Low-threshold native-oxide confined narrow-stripe folded-cavity surface-emitting InGaAs-GaAs lasers

被引:2
作者
Cheng, Y
Yang, GM
MacDougal, MH
Dapkus, PD
机构
[1] National Center for Integrated Photonic Technology, Department of Electrical Engineering/Electrophysics, University of Southern California, Los Angeles
关键词
D O I
10.1109/68.477259
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Narrow-stripe folded-cavity surface-emitting InGaAs-GaAs lasers are demonstrated, AlAs native-oxide layers above and below waveguide region are employed for current and optical confinement to form narrow-stripe InGaAs-GaAs quantum-well lasers, A low-temperature (400 degrees C) selective wet-oxidation technique and an ion-beam-etching technique are used to fabricate insulator confined narrow-stripes and internal 45 degrees deflectors, respectively, Continuous-wave threshold currents as low as 4.5 mA and 59% surface-emitting quantum efficiencies are achieved on the devices with a 2-mu m-wide aperture and a 420-mu m-long cavity.
引用
收藏
页码:1391 / 1393
页数:3
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