ATOMIC-FORCE MICROSCOPE INTEGRATED WITH A SCANNING ELECTRON-MICROSCOPE FOR TIP FABRICATION

被引：15

作者：

WALTERS, DA

HAMPTON, D

DRAKE, B

HANSMA, HG

HANSMA, PK

机构：

[1] Department of Physics, University of California, Santa Barbara

来源：

APPLIED PHYSICS LETTERS | 1994年 / 65卷 / 06期

关键词：

D O I：

10.1063/1.112231

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In a new combined atomic force microscope/scanning electron microscope, we have been able to fabricate and test electron-beam-deposited tips (e-beam tips). With this instrument it was possible to test newly grown e-beam tips within a few minutes of their formation, without ever breaking vacuum. Typical results on oxide-sharpened conventional tips showed that the radius of curvature could be reduced by a factor of 2.5 with the e-beam tips.

引用

收藏

页码：787 / 789

页数：3

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