MICROWAVE ION-SOURCE WITH LINEAR ANTENNAE

被引：4

作者：

WADA, M ^{[1
]}

HAMABE, M ^{[1
]}

TSUJI, K ^{[1
]}

TSUDA, H ^{[1
]}

MIYAMOTO, N ^{[1
]}

OHTANI, Y ^{[1
]}

机构：

[1] NISSHIN ELECT CO LTD,UKYO KU,KYOTO 615,JAPAN

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 05期

关键词：

D O I：

10.1063/1.1144873

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A microwave ion source equipped with two linear antennae set parallel to the wall of the source chamber has been designed and built. A homogeneous plasma of Ar was produced in an aluminum chamber of 22 cm long, 9 cm wide, and 6 cm deep. Beam forming grids produced a rectangular beam of 17 cm by 3 cm. The current density of the extracted Ar+ beam was 0.16 mA/cm2 at the center of the extraction area when the input power to the magnetrons was 360 W The energy distribution function of the extracted ions was measured with an electrostatic analyzer. The measured energy distribution showed a presence of high energy ions in the extracted beam.

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页码：1757 / 1764

页数：8

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