EXACT SOLUTION OF THE PROXIMITY EFFECT EQUATION BY A SPLITTING METHOD

被引：11

作者：

GERBER, PD

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.583969

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：432 / 435

页数：4

相关论文

共 4 条

[1] TRANSFORM BASED PROXIMITY CORRECTIONS - EXPERIMENTAL RESULTS AND COMPARISONS
HASLAM, ME
MCDONALD, JF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 168 - 175
[2] JOHN F, 1971, APPLIED MATH SCI, V1, P170
[3] PROXIMITY EFFECTS IN ELECTRON LITHOGRAPHY - MAGNITUDE AND CORRECTION TECHNIQUES
PARIKH, M
[J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (04) : 438 - 457
[4] PROXIMITY EFFECT CORRECTION CALCULATIONS BY THE INTEGRAL-EQUATION APPROXIMATE SOLUTION METHOD
PAVKOVICH, JM
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 159 - 163