TRANSFORM BASED PROXIMITY CORRECTIONS - EXPERIMENTAL RESULTS AND COMPARISONS

被引:15
作者
HASLAM, ME
MCDONALD, JF
机构
[1] Rensselaer Polytechnic Inst, Troy,, NY, USA, Rensselaer Polytechnic Inst, Troy, NY, USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 01期
关键词
D O I
10.1116/1.583372
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
LITHOGRAPHY
引用
收藏
页码:168 / 175
页数:8
相关论文
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