AN IMAGE-PROCESSING APPROACH TO FAST, EFFICIENT PROXIMITY CORRECTION FOR ELECTRON-BEAM LITHOGRAPHY

被引:14
作者
CHOW, DGL
MCDONALD, JF
KING, DC
SMITH, W
MOLNAR, K
STECKL, AJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期
关键词
D O I
10.1116/1.582705
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1383 / 1390
页数:8
相关论文
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