GENERAL-ASPECTS OF BARRIER LAYERS FOR VERY-LARGE-SCALE INTEGRATION APPLICATIONS .1. CONCEPTS

被引：33

作者：

HO, PS

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(82)90514-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：301 / 316

页数：16

共 33 条

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