INFLUENCE OF SURFACE-COATINGS ON ELASTICITY, RESIDUAL-STRESSES, AND FRACTURE PROPERTIES OF SILICON MICROELEMENTS

[1] MICROFABRICATED STRUCTURES FOR THE INSITU MEASUREMENT OF RESIDUAL-STRESS, YOUNGS MODULUS, AND ULTIMATE STRAIN OF THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1987, 51 (04) : 241 - 243

[2] BROWN WF, 1966, ASTM SPECIAL TECHNIC, V410

[3] CHEN CP, 1980, AM CERAM SOC BULL, V59, P469

[4] ERICSON F, IN PRESS J MATER SCI

[5] A SIMPLE TECHNIQUE FOR THE DETERMINATION OF MECHANICAL STRAIN IN THIN-FILMS WITH APPLICATIONS TO POLYSILICON [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (05) : 1671 - 1675

[6] Howe R. T., 1983, Sensors and Actuators, V4, P447, DOI 10.1016/0250-6874(83)85056-2

[7] STRESS IN POLYCRYSTALLINE AND AMORPHOUS-SILICON THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4674 - 4675

[8] FRACTURE TESTING OF SILICON MICROELEMENTS INSITU IN A SCANNING ELECTRON-MICROSCOPE [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) : 4799 - 4803

[9] YOUNGS MODULUS MEASUREMENTS OF THIN-FILMS USING MICROMECHANICS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 6761 - 6766

[10] ON THE SMALL CRACK FRACTURE-MECHANICS [J]. INTERNATIONAL JOURNAL OF FRACTURE, 1983, 22 (03) : 203 - 216

[1] MICROFABRICATED STRUCTURES FOR THE INSITU MEASUREMENT OF RESIDUAL-STRESS, YOUNGS MODULUS, AND ULTIMATE STRAIN OF THIN-FILMS [J]. APPLIED PHYSICS LETTERS, 1987, 51 (04) : 241 - 243

[2] BROWN WF, 1966, ASTM SPECIAL TECHNIC, V410

[3] CHEN CP, 1980, AM CERAM SOC BULL, V59, P469

[4] ERICSON F, IN PRESS J MATER SCI

[5] A SIMPLE TECHNIQUE FOR THE DETERMINATION OF MECHANICAL STRAIN IN THIN-FILMS WITH APPLICATIONS TO POLYSILICON [J]. JOURNAL OF APPLIED PHYSICS, 1985, 57 (05) : 1671 - 1675

[6] Howe R. T., 1983, Sensors and Actuators, V4, P447, DOI 10.1016/0250-6874(83)85056-2

[7] STRESS IN POLYCRYSTALLINE AND AMORPHOUS-SILICON THIN-FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (08) : 4674 - 4675

[8] FRACTURE TESTING OF SILICON MICROELEMENTS INSITU IN A SCANNING ELECTRON-MICROSCOPE [J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (10) : 4799 - 4803

[9] YOUNGS MODULUS MEASUREMENTS OF THIN-FILMS USING MICROMECHANICS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 6761 - 6766

[10] ON THE SMALL CRACK FRACTURE-MECHANICS [J]. INTERNATIONAL JOURNAL OF FRACTURE, 1983, 22 (03) : 203 - 216