EFFECT OF ION-BOMBARDMENT DURING GROWTH ON THE ELECTRICAL-RESISTIVITY OF MAGNETRON-SPUTTERED CARBON-FILMS

被引：9

作者：

PETROV, I

ORLINOV, V

IVANOV, I

KOURTEV, J

JELEV, J

机构：

来源：

关键词：

D O I：

10.1016/0040-6090(89)90010-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：239 / 248

页数：10

相关论文

共 13 条

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[12] WEISSMANTEL C, 1985, THIN FILMS FREE ATOM, P153
[13] PROPERTIES OF AMORPHOUS-CARBON FILMS PRODUCED BY MAGNETRON SPUTTERING
WYON, C
GILLET, R
LOMBARD, L
[J]. THIN SOLID FILMS, 1984, 122 (03) : 203 - 216