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SILVER SENSITIZATION OF GERMANIUM SELENIDE FILMS

被引：5
作者：
VENKATESAN, T
WILKENS, B
VINCENT, S
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 09期
关键词：
D O I：
10.1063/1.331521
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：6453 / 6456
页数：4
相关论文
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RAJAGOPALAN S, 1981, 9TH P INT C AM LIQ S
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[4]   ELECTROCHEMICAL ADSORPTION OF METALS ON AMORPHOUS SE-GE FILMS [J].
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[5]   BILEVEL HIGH-RESOLUTION PHOTOLITHOGRAPHIC TECHNIQUE FOR USE WITH WAFERS WITH STEPPED AND-OR REFLECTING SURFACES [J].
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[6]  
VADINSKY RG, UNPUB
[7]   THE CHEMICAL-REACTIVITY AND LITHOGRAPHIC SENSITIVITY OF OBLIQUELY DEPOSITED GERMANIUM SELENIDE FILMS USED AS LOW-ENERGY ION-BEAM RESISTS [J].
VENKATESAN, T .
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