CHEMICAL ETCHING OF GERMANIUM WITH H3PO4-H2O2-H2O SOLUTION

被引：29

作者：

KAGAWA, S

MIKAWA, T

KANEDA, T

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1982年 / 21卷 / 11期

关键词：

D O I：

10.1143/JJAP.21.1616

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1616 / 1618

页数：3

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共 5 条

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