共 12 条
[2]
FUJIWARA N, 1992, 14TH P S DRY PROC, P211
[3]
CONTROL OF FLOATING POTENTIAL IN AN ELECTRON-BEAM-EXCITED PLASMA
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1994, 33 (3A)
:L383-L386
[5]
NEW HIGH-CURRENT LOW-ENERGY ION-SOURCE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1987, 5 (01)
:366-368
[6]
ITO A, 1993, 10TH P S PLASM P, P195
[7]
KATO S, 1988, NUCL INSTRUM METH B, V5, P550
[10]
ONO T, 1986, J VAC SCI TECHNOL B, V4, P696, DOI 10.1116/1.583599