OPTICAL AND ELECTRICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY TETRODE RF SPUTTERING

被引:7
作者
GEKKA, Y
FUNABASHI, S
YASUMURA, Y
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来源
APPLICATIONS OF SURFACE SCIENCE | 1982年 / 11-2卷 / JUL期
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D O I
10.1016/0378-5963(82)90097-6
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学科分类号
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页码:528 / 534
页数:7
相关论文
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