SOFT-X-RAY CONTACT MICROSCOPY

被引:20
作者
CHENG, PC
FEDER, R
SHINOZAKI, DM
TAN, KH
EASON, RW
MICHETTE, A
ROSSER, RJ
机构
[1] UNIV WESTERN ONTARIO,FAC ENGN SCI,LONDON N6A 5B9,ONTARIO,CANADA
[2] UNIV WISCONSIN,PHYS SCI LAB,CANADIAN SYNCHROTRON RADIAT FACIL,STOUGHTON,WI 53589
[3] UNIV ESSEX,DEPT PHYS,COLCHESTER CO4 3SQ,ESSEX,ENGLAND
[4] UNIV LONDON KINGS COLL,DEPT PHYS,LONDON WC2R 2LS,ENGLAND
[5] SUNY STONY BROOK,DEPT PHYS,STONY BROOK,NY 11794
关键词
D O I
10.1016/0168-9002(86)90171-3
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:668 / 674
页数:7
相关论文
共 12 条
  • [11] X-RAY-LITHOGRAPHY USING A PULSED PLASMA SOURCE
    PEARLMAN, JS
    RIORDAN, JC
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1190 - 1193
  • [12] SOFT-X-RAY CONTACT MICROSCOPY WITH NANOSECOND EXPOSURE TIMES
    ROSSER, RJ
    BALDWIN, KG
    FEDER, R
    BASSETT, D
    COLES, A
    EASON, RW
    [J]. JOURNAL OF MICROSCOPY-OXFORD, 1985, 138 (JUN): : 311 - 319