GENERATION OF LOW-ENERGY NEUTRAL BEAMS AND RADIATION-DAMAGE OF SIO2/SI BY NEUTRAL BOMBARDMENT

被引：17

作者：

MIZUTANI, T

NISHIMATSU, S

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.584782

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：547 / 550

页数：4

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