RESOLUTION LIMIT DUE TO THERMAL EFFECTS IN LOW-TEMPERATURE SCANNING ELECTRON-MICROSCOPY

被引:16
作者
PAVLICEK, H
FREYTAG, L
SEIFERT, H
HUEBENER, RP
机构
关键词
D O I
10.1007/BF00681443
中图分类号
O59 [应用物理学];
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页码:237 / 257
页数:21
相关论文
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