LOW-TEMPERATURE ION-BEAM MIXING OF PT AND SI MARKERS IN GE

被引:9
作者
KIM, SJ [1 ]
NICOLET, MA [1 ]
AVERBACK, RS [1 ]
BALDO, P [1 ]
机构
[1] ARGONNE NATL LAB,DIV MAT SCI & TECHNOL,ARGONNE,IL 60439
关键词
D O I
10.1063/1.95719
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:154 / 156
页数:3
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