BUCKET-TYPE ION-SOURCE FOR ION MILLING

被引：10

作者：

ONO, Y ^{[1
]}

KUROSAWA, T ^{[1
]}

SATO, T ^{[1
]}

OKA, Y ^{[1
]}

HASHIMOTO, I ^{[1
]}

机构：

[1] HITACHI LTD,KOKUBU WORKS,HITACHI,IBARAKI 316,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 03期

关键词：

D O I：

10.1116/1.573814

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：788 / 790

页数：3

共 7 条

[1]

BOLLINGER D, 1980, SOLID STATE TECHNOL, V25, P97

[2]

GREEN TS, 1978, 10TH P S FUS TECHN P, P903

[3] TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .2. APPLICATIONS [J].

HARPER, JME ;

CUOMO, JJ ;

KAUFMAN, HR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :737-756

[4] TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .1. ION-SOURCE TECHNOLOGY [J].

KAUFMAN, HR ;

CUOMO, JJ ;

HARPER, JME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :725-736

[5] 30-CENTIMETER-DIAMETER ION MILLING SOURCE [J].

ROBINSON, RS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02) :277-280

[6]

Spencer E.G., 1972, J VAC SCI TECHNOL, V8, pS52

[7]

Thompson G. R., 1983, Proceedings of the International Ion Engineering Congress. The 7th Symposium (1983 International) on Ion Sources and Ion Assisted Technology (ISIAT '83) and the 4th International Conference on Ion and Plasma Assisted Techniques (IPAT '83), P727

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