EVIDENCE FOR A STABLE SI(111)7X7-O RECONSTRUCTION FROM QUANTITATIVE TRANSMISSION ELECTRON-DIFFRACTION

被引:16
作者
GIBSON, JM
机构
[1] AT and T Bell Laboratories, Murray Hill
关键词
D O I
10.1016/0039-6028(90)90611-B
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
We show that oxygen binds readily in a bridging site of adatom backbonds in the Si(111)7 × 7 surface. Furthermore, a well-ordered Si(111)7 × 7: O structure is stable in excess of 105 L O2 exposure at room temperature. Electron beam irradiation during dosing additionally leads to very rapid disordering of the surface. © 1990.
引用
收藏
页码:L531 / L536
页数:6
相关论文
共 14 条
  • [1] OXIDATION UNDER ELECTRON-BOMBARDMENT - A TOOL FOR STUDYING THE INITIAL STATES OF SILICON OXIDATION
    CARRIERE, B
    DEVILLE, JP
    ELMAACHI, A
    [J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (06): : 721 - 733
  • [2] SIO2 ULTRA THIN-FILM GROWTH-KINETICS AS INVESTIGATED BY SURFACE TECHNIQUES
    DERRIEN, J
    COMMANDRE, M
    [J]. SURFACE SCIENCE, 1982, 118 (1-2) : 32 - 46
  • [3] OXIDATION OF SILICON WITH A 5 EV O--BEAM
    HECHT, MH
    ORIENT, OJ
    CHUTJIAN, A
    VASQUEZ, RP
    [J]. APPLIED PHYSICS LETTERS, 1989, 54 (05) : 421 - 423
  • [4] VIBRATIONAL STUDY OF THE INITIAL-STAGES OF THE OXIDATION OF SI(111) AND SI(100) SURFACES
    IBACH, H
    BRUCHMANN, HD
    WAGNER, H
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1982, 29 (03): : 113 - 124
  • [5] OXIDATION OF SI(111)-(7X7) AS STUDIED BY SCANNING TUNNELING MICROSCOPY
    LEIBSLE, FM
    SAMSAVAR, A
    CHIANG, TC
    [J]. PHYSICAL REVIEW B, 1988, 38 (08): : 5780 - 5783
  • [6] DESIGN OF AN ULTRAHIGH-VACUUM SPECIMEN ENVIRONMENT FOR HIGH-RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY
    MCDONALD, ML
    GIBSON, JM
    UNTERWALD, FC
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1989, 60 (04) : 700 - 707
  • [7] INITIAL-STAGES OF OXYGEN-ADSORPTION ON SI(111) - THE STABLE STATE
    MORGEN, P
    HOFER, U
    WURTH, W
    UMBACH, E
    [J]. PHYSICAL REVIEW B, 1989, 39 (06): : 3720 - 3734
  • [8] ODHOMARI I, IN PRESS SURF SCI
  • [9] PELZ JP, IN PRESS
  • [10] THE ROLE OF STRAIN IN SI(111)7X7 AND RELATED RECONSTRUCTED SURFACES
    ROBINSON, IK
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1966 - 1970