OXIDATION UNDER ELECTRON-BOMBARDMENT - A TOOL FOR STUDYING THE INITIAL STATES OF SILICON OXIDATION

被引：17

作者：

CARRIERE, B

DEVILLE, JP

ELMAACHI, A

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1987年 / 55卷 / 06期

关键词：

D O I：

10.1080/13642818708218376

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：721 / 733

页数：13

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