OXIDATION UNDER ELECTRON-BOMBARDMENT - A TOOL FOR STUDYING THE INITIAL STATES OF SILICON OXIDATION

被引：17

作者：

CARRIERE, B

DEVILLE, JP

ELMAACHI, A

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1987年 / 55卷 / 06期

关键词：

D O I：

10.1080/13642818708218376

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：721 / 733

页数：13

相关论文

共 17 条

[11] SI-O BOND FORMATION ON THE SI(100)-2X1 SURFACE AT THE EARLY STAGE OF OXIDATION AS OBSERVED BY AES
KEIM, EG
[J]. SURFACE SCIENCE, 1984, 148 (2-3) : L641 - L644
[12] AN INVESTIGATION OF THE INTERACTION OF N2O WITH THE SI(111)-7X7 SURFACE USING AES AND OPTICAL REFLECTOMETRY - A COMPARISON WITH O2
KEIM, EG
VANSILFHOUT, A
[J]. SURFACE SCIENCE, 1985, 152 (APR) : 1096 - 1102
[13] ELECTRON-BEAM INDUCED EFFECTS ON GAS ADSORPTION UTILIZING AUGER-ELECTRON SPECTROSCOPY - CO AND O2 ON SI .1. ADSORPTION STUDIES
KIRBY, RE
LICHTMAN, D
[J]. SURFACE SCIENCE, 1974, 41 (02) : 447 - 466
[14] AES STUDY OF SILICON BONDING STATES DURING OXIDATION OF SI(111)
LANG, B
SCHOLLER, P
CARRIERE, B
[J]. SURFACE SCIENCE, 1980, 99 (01) : 103 - 111
[15] OXYGEN-ADSORPTION ON SI(111) IN DIFFERENT MODIFICATIONS - 7X7, 1X1-NI, AND SPUTTERED
MORGEN, P
WURTH, W
UMBACH, E
[J]. SURFACE SCIENCE, 1985, 152 (APR) : 1086 - 1095
[16] INITIAL-STAGES OF OXIDATION OF SI(100)(2X1) - A COMBINED VIBRATIONAL (EELS) AND ELECTRON-BINDING ENERGY (XPS) STUDY
SCHAEFER, JA
GOPEL, W
[J]. SURFACE SCIENCE, 1985, 155 (2-3) : 535 - 552
[17] OXIDATION AND THE STRUCTURE OF THE SILICON-OXIDE INTERFACE
STONEHAM, AM
GROVENOR, CRM
CEREZO, A
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (02): : 201 - 210