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A COMPARISON BETWEEN THERMAL ANNEALING AND ION MIXING OF MULTILAYERED NI-W FILMS ON SI .2.
被引:10
作者
:
PAI, CS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
PAI, CS
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
LAU, SS
POKER, DB
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
POKER, DB
HUNG, LS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
HUNG, LS
机构
:
[1]
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
[2]
CORNELL UNIV,DEPT MAT SCI & ENGN,ITHACA,NY 14853
来源
:
JOURNAL OF APPLIED PHYSICS
|
1985年
/ 58卷
/ 11期
关键词
:
D O I
:
10.1063/1.335550
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:4178 / 4185
页数:8
相关论文
共 9 条
[1]
ALTERNATIVE MARKER EXPERIMENT IN FORMATION OF MO AND W SILICIDES
BAGLIN, J
论文数:
0
引用数:
0
h-index:
0
BAGLIN, J
DHEURLE, F
论文数:
0
引用数:
0
h-index:
0
DHEURLE, F
PETERSSON, S
论文数:
0
引用数:
0
h-index:
0
PETERSSON, S
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(04)
: 289
-
290
[2]
IDENTIFICATION OF DOMINANT DIFFUSING SPECIES IN SILICIDE FORMATION
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
CHU, WK
KRAUTLE, H
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
KRAUTLE, H
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
MAYER, JW
MULLER, H
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
MULLER, H
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
NICOLET, MA
TU, KN
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
TU, KN
[J].
APPLIED PHYSICS LETTERS,
1974,
25
(08)
: 454
-
457
[3]
COMPARISON OF ANNEALING AND ION-IMPLANTATION EFFECTS DURING SOLID-STATE DISILICIDE FORMATION
DHEURLE, FM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, United States
DHEURLE, FM
TSAI, MY
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, United States
TSAI, MY
PETERSSON, CS
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, United States
PETERSSON, CS
STRITZKER, B
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, United States
STRITZKER, B
[J].
JOURNAL OF APPLIED PHYSICS,
1982,
53
(04)
: 3067
-
3069
[4]
DHEURLE FM, 1980, J APPL PHYS, V51, P5976, DOI 10.1063/1.327517
[5]
SILICIDE FORMATION WITH BILAYERS OF PD-PT, PD-NI, AND PT-NI
FINSTAD, TG
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
FINSTAD, TG
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
NICOLET, MA
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(01)
: 303
-
307
[6]
MARKER EXPERIMENTS IN GROWTH-STUDIES OF NI2SI, PD2SI, AND CRSI2 FORMED BOTH BY THERMAL ANNEALING AND BY ION MIXING
HUNG, LS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
HUNG, LS
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
MAYER, JW
PAI, CS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
PAI, CS
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
LAU, SS
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
58
(04)
: 1527
-
1536
[7]
SILICIDE FORMATION WITH PD-V ALLOYS AND BILAYERS
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
MAYER, JW
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LAU, SS
TU, KN
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
TU, KN
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(09)
: 5855
-
5859
[8]
A COMPARISON BETWEEN THERMAL ANNEALING AND ION MIXING OF ALLOYED NI-W FILMS ON SI .1.
PAI, CS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
PAI, CS
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
LAU, SS
POKER, DB
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
POKER, DB
HUNG, LS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
HUNG, LS
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
58
(11)
: 4172
-
4177
[9]
TSAUR BY, 1980, P S THIN FILM INTERF, V80, P205
←
1
→
共 9 条
[1]
ALTERNATIVE MARKER EXPERIMENT IN FORMATION OF MO AND W SILICIDES
BAGLIN, J
论文数:
0
引用数:
0
h-index:
0
BAGLIN, J
DHEURLE, F
论文数:
0
引用数:
0
h-index:
0
DHEURLE, F
PETERSSON, S
论文数:
0
引用数:
0
h-index:
0
PETERSSON, S
[J].
APPLIED PHYSICS LETTERS,
1978,
33
(04)
: 289
-
290
[2]
IDENTIFICATION OF DOMINANT DIFFUSING SPECIES IN SILICIDE FORMATION
CHU, WK
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
CHU, WK
KRAUTLE, H
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
KRAUTLE, H
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
MAYER, JW
MULLER, H
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
MULLER, H
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
NICOLET, MA
TU, KN
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91109
TU, KN
[J].
APPLIED PHYSICS LETTERS,
1974,
25
(08)
: 454
-
457
[3]
COMPARISON OF ANNEALING AND ION-IMPLANTATION EFFECTS DURING SOLID-STATE DISILICIDE FORMATION
DHEURLE, FM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, United States
DHEURLE, FM
TSAI, MY
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, United States
TSAI, MY
PETERSSON, CS
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, United States
PETERSSON, CS
STRITZKER, B
论文数:
0
引用数:
0
h-index:
0
机构:
IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598, United States
STRITZKER, B
[J].
JOURNAL OF APPLIED PHYSICS,
1982,
53
(04)
: 3067
-
3069
[4]
DHEURLE FM, 1980, J APPL PHYS, V51, P5976, DOI 10.1063/1.327517
[5]
SILICIDE FORMATION WITH BILAYERS OF PD-PT, PD-NI, AND PT-NI
FINSTAD, TG
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
FINSTAD, TG
NICOLET, MA
论文数:
0
引用数:
0
h-index:
0
机构:
CALTECH,PASADENA,CA 91125
CALTECH,PASADENA,CA 91125
NICOLET, MA
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(01)
: 303
-
307
[6]
MARKER EXPERIMENTS IN GROWTH-STUDIES OF NI2SI, PD2SI, AND CRSI2 FORMED BOTH BY THERMAL ANNEALING AND BY ION MIXING
HUNG, LS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
HUNG, LS
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
MAYER, JW
PAI, CS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
PAI, CS
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
UNIV CALIF SAN DIEGO,DEPT ELECT ENGN & COMP SCI,LA JOLLA,CA 92037
LAU, SS
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
58
(04)
: 1527
-
1536
[7]
SILICIDE FORMATION WITH PD-V ALLOYS AND BILAYERS
MAYER, JW
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
MAYER, JW
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LAU, SS
TU, KN
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
TU, KN
[J].
JOURNAL OF APPLIED PHYSICS,
1979,
50
(09)
: 5855
-
5859
[8]
A COMPARISON BETWEEN THERMAL ANNEALING AND ION MIXING OF ALLOYED NI-W FILMS ON SI .1.
PAI, CS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
PAI, CS
LAU, SS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
LAU, SS
POKER, DB
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
POKER, DB
HUNG, LS
论文数:
0
引用数:
0
h-index:
0
机构:
OAK RIDGE NATL LAB,DIV SOLID STATE,OAK RIDGE,TN 37831
HUNG, LS
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
58
(11)
: 4172
-
4177
[9]
TSAUR BY, 1980, P S THIN FILM INTERF, V80, P205
←
1
→