ELECTRIC-FIELD EFFECT OF SRTIO3/YBA2CU3O7-X MULTILAYERS GROWN BY ALL-MBE

被引:9
作者
NAKAMURA, T
TOKUDA, H
IIYAMA, M
机构
[1] Systems & Electronics R&D Center, Sumitomo Electric Industries, LTD., Osaka 554, 1-1-3, Shimaya, Konohana-ku
关键词
D O I
10.1109/77.403192
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Epitaxial SrTiO3/YBa2Cu3O7-x (STO/YBCO) multilayers fora superconducting field-effect transistor (SuFET) were fabricated by an ozone assisted Molecular Beam Epitaxcy (MBE) method. To eliminate interdiffusion at the interface, we deposited high quality STO films at around 500 degrees C on YBCO films with clean surfaces. At this temperature, interdiffusion was negligible through in-situ Auger Electron Spectroscopy (AES). The electric field effect in a Ag/STO/YBCO device configuration also indicated the suppression of the interfacial layer between the STO and YBCO film.
引用
收藏
页码:2875 / 2878
页数:4
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