SPUTTERING INVESTIGATIONS WITH THE MONTE-CARLO PROGRAM TRIM SP

被引：54

作者：

ECKSTEIN, W ^{[1
]}

BIERSACK, J ^{[1
]}

机构：

[1] HAHN MEITNER INST KERNFORSCH BERLIN GMBH, D-1000 BERLIN 39, FED REP GER

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1984年 / 2卷 / 1-3期

关键词：

D O I：

10.1016/0168-583X(84)90264-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：550 / 554

页数：5

共 22 条

[1]

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ECKSTEIN, W ;

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :631-634

[3] SPUTTERING MECHANISM FOR LOW-ENERGY LIGHT-IONS [J].

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MADERLECHNER, G ;

SCHERZER, BMU ;

ROBINSON, MT .

APPLIED PHYSICS, 1979, 18 (04) :391-398

[4]

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[5]

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[6]

ECKSTEIN W, 1983, IPP941 REP

[7]

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[8] RANGES AND RANGE THEORIES [J].

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OETZMANN, H .

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[9]

LINDHARD J, 1953, MAT FYS MEDD DAN VID, V27, P1

[10] PRIMARY RECOIL CONTRIBUTION TO LOW-ENERGY LIGHT-ION SPUTTERING [J].

LITTMARK, U ;

FEDDER, S .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 194 (1-3) :607-610

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