INVESTIGATIONS OF AMMONIUM SULFIDE SURFACE TREATMENTS ON GAAS

被引:109
作者
CARPENTER, MS [1 ]
MELLOCH, MR [1 ]
COWANS, BA [1 ]
DARDAS, Z [1 ]
DELGASS, WN [1 ]
机构
[1] PURDUE UNIV,DEPT CHEM ENGN,W LAFAYETTE,IN 47907
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.584612
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:845 / 850
页数:6
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