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ADDITION
被引:9
作者
:
HAWRYLUK, RJ
论文数:
0
引用数:
0
h-index:
0
HAWRYLUK, RJ
机构
:
来源
:
JOURNAL OF APPLIED PHYSICS
|
1982年
/ 53卷
/ 08期
关键词
:
D O I
:
10.1063/1.331408
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:5985 / 5985
页数:1
相关论文
共 6 条
[1]
HAWRYLUK AM, 1974, 197451 LINC LAB TECH
[2]
ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING - EXPERIMENT
HAWRYLUK, RJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, RJ
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
SMITH, HI
SOARES, A
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
SOARES, A
HAWRYLUK, AM
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, AM
[J].
JOURNAL OF APPLIED PHYSICS,
1975,
46
(06)
: 2528
-
2537
[3]
EXPOSURE AND DEVELOPMENT MODELS USED IN ELECTRON-BEAM LITHOGRAPHY
HAWRYLUK, RJ
论文数:
0
引用数:
0
h-index:
0
HAWRYLUK, RJ
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981,
19
(01):
: 1
-
17
[4]
ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING
HAWRYLUK, RJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, RJ
HAWRYLUK, AM
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, AM
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
SMITH, HI
[J].
JOURNAL OF APPLIED PHYSICS,
1974,
45
(06)
: 2551
-
2566
[5]
HAWRYLUK RJ, 1974, 6TH P INT C EL ION B, P87
[6]
NEW MODEL OF ELECTRON FREE-PATH IN MULTIPLE LAYERS FOR MONTE-CARLO SIMULATION
HORIGUCHI, S
论文数:
0
引用数:
0
h-index:
0
HORIGUCHI, S
SUZUKI, M
论文数:
0
引用数:
0
h-index:
0
SUZUKI, M
KOBAYASHI, T
论文数:
0
引用数:
0
h-index:
0
KOBAYASHI, T
YOSHINO, H
论文数:
0
引用数:
0
h-index:
0
YOSHINO, H
SAKAKIBARA, Y
论文数:
0
引用数:
0
h-index:
0
SAKAKIBARA, Y
[J].
APPLIED PHYSICS LETTERS,
1981,
39
(06)
: 512
-
514
←
1
→
共 6 条
[1]
HAWRYLUK AM, 1974, 197451 LINC LAB TECH
[2]
ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING - EXPERIMENT
HAWRYLUK, RJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, RJ
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
SMITH, HI
SOARES, A
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
SOARES, A
HAWRYLUK, AM
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, AM
[J].
JOURNAL OF APPLIED PHYSICS,
1975,
46
(06)
: 2528
-
2537
[3]
EXPOSURE AND DEVELOPMENT MODELS USED IN ELECTRON-BEAM LITHOGRAPHY
HAWRYLUK, RJ
论文数:
0
引用数:
0
h-index:
0
HAWRYLUK, RJ
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981,
19
(01):
: 1
-
17
[4]
ENERGY DISSIPATION IN A THIN POLYMER FILM BY ELECTRON-BEAM SCATTERING
HAWRYLUK, RJ
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, RJ
HAWRYLUK, AM
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
HAWRYLUK, AM
SMITH, HI
论文数:
0
引用数:
0
h-index:
0
机构:
MIT,LINCOLN LAB,LEXINGTON,MA 02173
SMITH, HI
[J].
JOURNAL OF APPLIED PHYSICS,
1974,
45
(06)
: 2551
-
2566
[5]
HAWRYLUK RJ, 1974, 6TH P INT C EL ION B, P87
[6]
NEW MODEL OF ELECTRON FREE-PATH IN MULTIPLE LAYERS FOR MONTE-CARLO SIMULATION
HORIGUCHI, S
论文数:
0
引用数:
0
h-index:
0
HORIGUCHI, S
SUZUKI, M
论文数:
0
引用数:
0
h-index:
0
SUZUKI, M
KOBAYASHI, T
论文数:
0
引用数:
0
h-index:
0
KOBAYASHI, T
YOSHINO, H
论文数:
0
引用数:
0
h-index:
0
YOSHINO, H
SAKAKIBARA, Y
论文数:
0
引用数:
0
h-index:
0
SAKAKIBARA, Y
[J].
APPLIED PHYSICS LETTERS,
1981,
39
(06)
: 512
-
514
←
1
→