PRODUCTION AND PROPERTIES OF AL-2O-3 LAYERS ON SILICON SUBSTRATES

被引：1

作者：

ALEXANDROVA, S ^{[1
]}

ATANASOVA, E ^{[1
]}

IVANOVICH, M ^{[1
]}

KAMADJIEV, P ^{[1
]}

KIROV, K ^{[1
]}

SIMEONOV, S ^{[1
]}

机构：

[1] BULGARIAN ACAD SCI,INST SOLID STATE PHYS,SOFIA,BULGARIA

来源：

ELECTRONICS LETTERS | 1976年 / 12卷 / 07期

关键词：

D O I：

10.1049/el:19760132

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：169 / 170

页数：2

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