INFLUENCE OF CONCENTRATION GRADIENTS AND SURFACE-ROUGHNESS ON MEASURED REDUCED THICKNESSES OF OVERLAYERS

被引：22

作者：

EBEL, MF

MOSER, G

EBEL, H

JABLONSKI, A

OPPOLZER, H

机构：

[1] POLISH ACAD SCI,INST PHYS CHEM,WARSAW 42,POLAND

[2] SIEMENS AG,FORSCH LAB,MUNICH,FED REP GER

来源：

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 1987年 / 42卷 / 01期

关键词：

D O I：

10.1016/0368-2048(87)85006-5

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

引用

页码：61 / 66

页数：6

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