THE MICROSTRUCTURE OF PROGRAMMED N+PN+ POLYCRYSTALLINE SILICON ANTIFUSES

被引：4

作者：

LUNNON, ME

GREVE, DW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1983年 / 54卷 / 06期

关键词：

D O I：

10.1063/1.332438

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3278 / 3281

页数：4

共 8 条

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