ORGANIC FILMS CONTAINING METAL PREPARED BY PLASMA POLYMERIZATION

被引：20

作者：

KASHIWAGI, K

YOSHIDA, Y

MURAYAMA, Y

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期

关键词：

D O I：

10.1116/1.574508

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

收藏

页码：1828 / 1830

页数：3

相关论文

共 4 条

[1] METAL-CONTAINING PLASMA-POLYMERIZED FILMS
ASANO, Y
[J]. THIN SOLID FILMS, 1983, 105 (01) : 1 - 8
[2] METAL DOPED POLYMER-FILMS PREPARED BY PLASMA POLYMERIZATION AND THEIR POTENTIAL APPLICATIONS
BIEDERMAN, H
[J]. VACUUM, 1984, 34 (3-4) : 405 - 410
[3] METAL DOPED POLYMER-FILMS PREPARED BY SIMULTANEOUS PLASMA POLYMERIZATION OF TETRAFLUOROMETHANE AND EVAPORATION OF GOLD
MARTINU, L
BIEDERMAN, H
ZEMEK, J
[J]. VACUUM, 1985, 35 (4-5) : 171 - 176
[4] PREPARATION AND PROPERTIES OF RF-SPUTTERED POLYMER METAL THIN-FILMS
ROY, RA
MESSIER, R
KRISHNASWAMY, SV
[J]. THIN SOLID FILMS, 1983, 109 (01) : 27 - 35