共 27 条
[1]
ABELES F, 1971, PHYS THIN FILMS, V6, P151
[3]
BEALE HA, 1981, IND RES DEV, V135
[4]
SPECTROSCOPIC MONITOR FOR SPUTTER-ETCHING PROCESSES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1973, 10 (01)
:108-110
[6]
METAL DOPED FLUOROCARBON POLYMER-FILMS PREPARED BY PLASMA POLYMERIZATION USING AN RF PLANAR MAGNETRON TARGET
[J].
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH,
1983, 212 (1-3)
:497-503
[8]
CUOMO JJ, 1977, IBM J RES DEV, V21, P580, DOI 10.1147/rd.216.0580
[9]
DILKS A, 1979, ACS SYM SER, V108, P195
[10]
OPTICAL SPECTROSCOPY FOR DIAGNOSTICS AND PROCESS-CONTROL DURING GLOW-DISCHARGE ETCHING AND SPUTTER DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1978, 15 (05)
:1718-1729