METAL DOPED FLUOROCARBON POLYMER-FILMS PREPARED BY PLASMA POLYMERIZATION USING AN RF PLANAR MAGNETRON TARGET

被引：28

作者：

BIEDERMAN, H ^{[1
]}

HOLLAND, L ^{[1
]}

机构：

[1] UNIV SUSSEX,SCH MATH & PHYS SCI,PLASMA MAT PROC LAB,BRIGHTON BN1 9RH,E SUSSEX,ENGLAND

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1983年 / 212卷 / 1-3期

关键词：

D O I：

10.1016/0167-5087(83)90735-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：497 / 503

页数：7

共 17 条

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BIEDERMAN, H
[J]. VACUUM, 1981, 31 (07) : 285 - 289
[4] BOOTHANOM N, 1974, THIN SOLID FILMS, V24, P395
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KAY, E
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ELPHICK, C
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[J]. NUCLEAR INSTRUMENTS & METHODS, 1973, 111 (03): : 555 - 560
[10] HOLLAND L, 1966, PROPERTIES GLASS SUR