TUNING A BABINET-SOLEIL COMPENSATOR FOR EXACT QUARTER WAVE RETARDATION IN AN ELLIPSOMETER

被引：4

作者：

AZZAM, RMA

KRUEGER, JA

机构：

[1] UNIV NEBRASKA,COLL MED,HEMATOL DIV,OMAHA,NB 68105

[2] UNIV NEBRASKA,COLL ENGN,ELECT MAT LAB,LINCOLN,NB 68508

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1975年 / 8卷 / 06期

关键词：

D O I：

10.1088/0022-3735/8/6/002

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：445 / 446

页数：2

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[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) : 600 - &
[2] CALIBRATION OF ELLIPSOMETER DIVIDED CIRCLES
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[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) : 1118 - &
[3] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY
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PASSAGLIA, E
STROMBERG, RR
STEINBERG, HL
[J]. JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04): : 363 - +