METAL ATOM CATALYZED OXIDATION OF SILICON

被引：7

作者：

CASTRO, GR ^{[1
]}

HULSE, JE ^{[1
]}

KUPPERS, J ^{[1
]}

机构：

[1] UNIV MUNICH,INST PHYS CHEM,D-8000 MUNICH 2,FED REP GER

来源：

APPLIED SURFACE SCIENCE | 1986年 / 27卷 / 03期

关键词：

Support by the Deutsche Forschungsgemeinschaft through SFB 128 is gratefully acknowledged;

D O I：

10.1016/0169-4332(86)90132-7

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：262 / 274

页数：13

共 18 条

[1] SILICON L2,3VV AUGER LINESHAPE AND OXYGEN-CHEMISORPTION STUDY OF PD4SI
BADER, SD
RICHTER, L
BRODSKY, MB
BROWER, WE
SMITH, GV
[J]. SOLID STATE COMMUNICATIONS, 1981, 37 (09) : 729 - 732
[2] MOLECULAR ORBITAL VIEW OF CHEMISORBED CARBON MONOXIDE
BLYHOLDER, G
[J]. JOURNAL OF PHYSICAL CHEMISTRY, 1964, 68 (10) : 2772 - &
[3] THE STRUCTURE AND PROPERTIES OF METAL-SEMICONDUCTOR INTERFACES
Brillson, L. J.
[J]. SURFACE SCIENCE REPORTS, 1982, 2 (02) : 123 - 326
[4] OXYGEN INTERACTION WITH COSI(100) AND COSI2(100) SURFACES
CASTRO, G
HULSE, JE
KUPPERS, J
GONZALEZELIPE, AR
[J]. SURFACE SCIENCE, 1982, 117 (1-3) : 621 - 628
[5] SPUTTERING OF COSI(100) AND COSI2(100) SINGLE-CRYSTAL SURFACES
CASTRO, GR
KUPPERS, J
IVASHCHENKO, Y
[J]. APPLICATIONS OF SURFACE SCIENCE, 1983, 16 (3-4): : 453 - 462
[6] INTERACTION OF OXYGEN WITH HCP (0001) RECRYSTALLIZED COBALT SURFACES
CASTRO, GR
KUPPERS, J
[J]. SURFACE SCIENCE, 1982, 123 (2-3) : 456 - 470
[7] MECHANISM OF GROWTH OF ULTRATHIN SIO2 LAYERS ON SILICIDE SUBSTRATES
CROS, A
[J]. SURFACE SCIENCE, 1985, 162 (1-3) : 702 - 707
[8] OXIDATION OF TI SILICIDE SURFACES
CROS, A
PIRRI, C
DERRIEN, J
[J]. SURFACE SCIENCE, 1985, 152 (APR) : 1113 - 1122
[9] CU-SI(111) INTERFACES - OXIDATION PROPERTIES IN RELATION WITH THEIR STRUCTURAL-PROPERTIES
DAUGY, E
MATHIEZ, P
SALVAN, F
LAYET, JM
DERRIEN, J
[J]. SURFACE SCIENCE, 1985, 152 (APR) : 1239 - 1246
[10] A PHOTOEMISSION INVESTIGATION OF THE SI-AU INTERFACE AND ITS BEHAVIOR UNDER OXYGEN EXPOSURE
DERRIEN, J
RINGEISEN, F
[J]. SURFACE SCIENCE, 1983, 124 (2-3) : L35 - L40

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