MEASUREMENT AND ANALYSIS OF GAAS-MESFET PARASITIC CAPACITANCES

被引:25
作者
ANHOLT, R [1 ]
SWIRHUN, S [1 ]
机构
[1] HONEYWELL INC,CTR SYST & RES,BLOOMINGTON,MN 55420
关键词
Semiconducting Gallium Arsenide--Ion Implantation - Transistors; Field Effect;
D O I
10.1109/22.85397
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
From S-parameter measurements and subsequent equivalent-circuit parameter extraction for a series of 0.25-mu-m, ion-implanted GaAs MESFET's with different widths and different gate-source and drain-source spacings, parasitic FET pad capacitances and interelectrode capacitances have been separated from active-FET capacitances. The active-FET fringe capacitances extracted at pinch-off are compared with results from two-dimensional Poisson simulations.
引用
收藏
页码:1247 / 1251
页数:5
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