PREPARATION OF HYDROGENATED AMORPHOUS SI-C ALLOY-FILMS AND THEIR PROPERTIES

被引：50

作者：

SARAIE, J ^{[1
]}

FUJII, Y ^{[1
]}

YOSHIMOTO, M ^{[1
]}

YAMAZOE, K ^{[1
]}

MATSUNAMI, H ^{[1
]}

机构：

[1] KYOTO UNIV,DEPT ELECT ENGN,KYOTO 606,JAPAN

来源：

THIN SOLID FILMS | 1984年 / 117卷 / 01期

关键词：

D O I：

10.1016/0040-6090(84)90192-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：59 / 69

页数：11

共 19 条

[1] ELECTRICAL AND OPTICAL-PROPERTIES OF AMORPHOUS SILICON-CARBIDE, SILICON-NITRIDE AND GERMANIUM CARBIDE PREPARED BY GLOW-DISCHARGE TECHNIQUE [J].

ANDERSON, DA ;

SPEAR, WE .

PHILOSOPHICAL MAGAZINE, 1977, 35 (01) :1-16

[2] ODMR INVESTIGATION OF RECOMBINATION PROCESSES IN A-SIXC1-X-H [J].

DEPINNA, SP ;

CAVENETT, BC ;

SUSSMANN, R .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1983, 47 (05) :L51-L55

[3] PHOTO-LUMINESCENCE IN AMORPHOUS SYSTEM SIXC1-X [J].

ENGEMANN, D ;

FISCHER, R ;

KNECHT, J .

APPLIED PHYSICS LETTERS, 1978, 32 (09) :567-568

[4]

FISCHER R, 1979, AMORPHOUS SEMICONDUC, P157

[5] INFRARED VIBRATIONAL-SPECTRA OF RF-SPUTTERED HYDROGENATED AMORPHOUS SILICON [J].

FREEMAN, EC ;

PAUL, W .

PHYSICAL REVIEW B, 1978, 18 (08) :4288-4300

[6]

KATAYAMA K, 1980, JPN J APPL PHYS S2, V19, P115

[7]

MARTIN PM, 1979, SOLAR ENERGY MATERIA, V2, P143

[8] POLARIZATION EFFECTS IN AC ELECTROLUMINESCENCE OF A-SI1-XCX-H [J].

MATSUNAMI, H ;

YOSHIMOTO, M ;

FUJII, Y ;

SARAIE, J .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) :569-572

[9] DEFECTS IN HYDROGENATED AMORPHOUS SILICON-CARBON ALLOY-FILMS PREPARED BY GLOW-DISCHARGE DECOMPOSITION AND SPUTTERING [J].

MORIMOTO, A ;

MIURA, T ;

KUMEDA, M ;

SHIMIZU, T .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) :7299-7305

[10] WHITE PHOTO-LUMINESCENCE OF AMORPHOUS SILICON-CARBON ALLOY PREPARED BY GLOW-DISCHARGE DECOMPOSITION OF TETRAMETHYLSILANE [J].

MUNEKATA, H ;

MURASATO, S ;

KUKIMOTO, H .

APPLIED PHYSICS LETTERS, 1980, 37 (06) :536-537

← 1 2 →