EFFECTS OF BIAS-TEMPERATURE CYCLING ON ELECTRICAL CHARACTERISTICS OF YBCOYSZSI SUIS CAPACITORS

被引：3

作者：

AJIMINE, EM ^{[1
]}

QIAO, JM ^{[1
]}

GIESE, GL ^{[1
]}

PATEL, PP ^{[1
]}

SEGOVIA, MA ^{[1
]}

YANG, CY ^{[1
]}

FORK, DK ^{[1
]}

机构：

[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1993年 / 22卷 / 06期

关键词：

BIAS-TEMPERATURE CYCLING; SUPERCONDUCTOR-INSULATOR-SEMICONDUCTOR CAPACITORS; YBCOYSZSI;

D O I：

10.1007/BF02666417

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A bias-temperature cycling technique is developed in the electrical characterization of YBa2Cu3O7-delta/yttria-stabilized zirconia (YSZ)/Si capacitors. This technique can be used to determine the electrical properties of the material components and their interfaces in the capacitor. Capacitance-voltage (C-V) measurements under no or weak illumination at temperatures ranging from 295 to 80K reveal that hysteresis due to mobile ions decreases with cooling and become vanishingly small at about 220K. Upon further cooling, a different mechanism due to traps in the YSZ/Si interface dominates the low-temperature hysteresis and stretchout of the C-V curves, which is evidenced by measurements for the illuminated device at 80K.

引用

页码：681 / 684

页数：4

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