LOW-TEMPERATURE HYSTERESIS EFFECTS IN METAL-OXIDE-SILICON CAPACITORS CAUSED BY SURFACE-STATE TRAPPING

被引:88
作者
GOETZBERGER, A
IRVIN, JC
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D O I
10.1109/T-ED.1968.16554
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:1009 / +
页数:1
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共 14 条
[1]   ELECTRODE CONTROL OF SIO2-PASSIVATED PLANAR JUNCTIONS [J].
CASTRUCCI, PP ;
LOGAN, JS .
IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1964, 8 (04) :394-&
[2]   RADIATION-INDUCED INCREASE IN SURFACE RECOMBINATION VELOCITY OF THERMALLY OXIDIZED SILICON STRUCTURES [J].
FITZGERA.DJ ;
GROVE, AS .
PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (11) :1601-+
[3]   BEHAVIOR OF MOS INVERSION LAYERS AT LOW TEMPERATURE [J].
GOETZBER.A .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1967, ED14 (11) :787-&
[4]   MOS AVALANCHE AND TUNNELING EFFECTS IN SILICON SURFACES [J].
GOETZBERGER, A ;
NICOLLIA.FH .
JOURNAL OF APPLIED PHYSICS, 1967, 38 (12) :4582-+
[5]  
GOETZBERGER A, 1966, APPL PHYS LETT, V9, P444
[6]   DENSITY OF SIO2-SI INTERFACE STATES - (MOS DEVICES SI OXIDATION 100 DEGREES C O2 + 80 PPM H2O FERMI LEVEL E) [J].
GRAY, PV ;
BROWN, DM .
APPLIED PHYSICS LETTERS, 1966, 8 (02) :31-&
[7]   INFLUENCE OF ILLUMINATION ON MIS CAPACITANCES IN STRONG INVERSION REGION [J].
GROSVALE.J ;
JUND, C .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1967, ED14 (11) :777-&
[8]   SURFACE EFFECTS ON P-N JUNCTIONS - CHARACTERISTICS OF SURFACE SPACE-CHARGE REGIONS UNDER NON-EQUILIBRIUM CONDITIONS [J].
GROVE, AS ;
FITZGERALD, DJ .
SOLID-STATE ELECTRONICS, 1966, 9 (08) :783-+
[9]   EFFECTS OF OXIDE TRAPS ON MOS CAPACITANCE [J].
HEIMAN, FP ;
WARFIELD, G .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (04) :167-&
[10]  
HOFSTEIN SR, 1964, SOLIDSTATE ELECTRON, V7, P59