NEW EMISSION-LINES IN HIGHLY CARBON ION-IMPLANTED GAAS

被引:22
作者
MAKITA, Y
YOKOTA, M
NOMURA, T
TANOUE, H
TAKAYASU, I
KATAOKA, S
IZUMI, T
MATSUMORI, T
机构
[1] TOKAI UNIV,HIRATSUKA,KANAGAWA 25912,JAPAN
[2] MITSUBISHI GAS CHEM CO,KATSUSHIKA KU,TOKYO 125,JAPAN
关键词
D O I
10.1016/0168-583X(85)90594-4
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:433 / 437
页数:5
相关论文
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