PROFILING OF SIGE SUPERLATTICES BY HE BACKSCATTERING

被引：13

作者：

KASPER, E

PABST, W

机构：

[1] AEG TELEFUNKEN, INST FORSCH, ULM, BUNDES REPUBLIK

[2] FRAUNHOFER GESELLSCHAFT, INST FESTKORPER TECHNOL, MUNICH, BUNDES REPUBLIK

来源：

THIN SOLID FILMS | 1976年 / 37卷 / 01期

关键词：

D O I：

10.1016/0040-6090(76)90522-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：L5 / L7

页数：3

共 16 条

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[8] ONE-DIMENSIONAL SIGE SUPERLATTICE GROWN BY UHV EPITAXY [J].

KASPER, E ;

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[9] GA1-XALXAS SUPERLATTICES PROFILED BY AUGER-ELECTRON SPECTROSCOPY [J].

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[10] PROFILING OF PERIODIC STRUCTURES (GAAS-GAAIAS) BY NUCLEAR BACKSCATTERING [J].

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ESAKI, L .

JOURNAL OF APPLIED PHYSICS, 1973, 44 (05) :2322-2325

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