共 31 条
- [22] VISIBLE-LASER PHOTOCHEMICAL ETCHING OF CR, MO, AND W [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01): : 414 - 418
- [24] Shimada T., 1980, Journal of the Physical Society of Japan, V49, P1245
- [25] TSUO S, 1987, 19TH P IEEE PHOT SPE, P705
- [26] TSUO S, COMMUNICATION
- [28] WEIL RB, 1988, Patent No. 4761302
- [30] GASEOUS PRODUCTS FROM THE REACTION OF XEF2 WITH SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1983, 54 (03) : 1218 - 1223