TEMPERATURE-DEPENDENCE OF SPUTTERING YIELD OF GAAS UNDER 30 KEV AR+ BOMBARDMENT

被引：6

作者：

BHATTACHARYYA, SR

GHOSE, D

BASU, D

机构：

[1] Mass Spectroscopy and Isotope Separator Laboratory, Saha Institute of Nuclear Physics, Calcutta, 700064, Block-AF, Sector-1, Bidhan Nagar

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1994年 / 13卷 / 16期

关键词：

D O I：

10.1007/BF00241008

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：1192 / 1194

页数：3

共 12 条

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