PULSED EXCIMER LASER ANNEALING OF ION-IMPLANTED SILICON - CHARACTERIZATION AND SOLAR-CELL FABRICATION

被引：15

作者：

LOWNDES, DH ^{[1
]}

CLELAND, JW ^{[1
]}

CHRISTIE, WH ^{[1
]}

EBY, RE ^{[1
]}

JELLISON, GE ^{[1
]}

NARAYAN, J ^{[1
]}

WESTBROOK, RD ^{[1
]}

WOOD, RF ^{[1
]}

NILSON, JA ^{[1
]}

DASS, SC ^{[1
]}

机构：

[1] LUMON INC,KANATA K2K 1Y3,ONTARIO,CANADA

来源：

关键词：

D O I：

10.1063/1.93342

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：938 / 940

页数：3

共 11 条

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[9] WOOD RL, UNPUB
[10] LASER PROCESSING FOR HIGH-EFFICIENCY SI SOLAR-CELLS
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