INVESTIGATION OF THE CHEMICAL BONDING OF CR AND TI TO SILICON-NITRIDE

被引：15

作者：

ORENT, TW

WAGNER, RA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 03期

关键词：

D O I：

10.1116/1.582660

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：844 / 849

页数：6

共 15 条

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