THIN-FILM INTERACTION BETWEEN TITANIUM AND POLYCRYSTALLINE SILICON

[1] AXELROD NN, UNPUBLISHED

[2] GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON [J]. APPLIED PHYSICS LETTERS, 1972, 20 (09) : 359 - &

[3] BUMPS ES, 1953, T AM SOC METAL, V45, P1008

[4] CHANG CC, UNPUBLISHED

[5] IMPLANTED NOBLE-GAS ATOMS AS DIFFUSION MARKERS IN SILICIDE FORMATION [J]. THIN SOLID FILMS, 1975, 25 (02) : 393 - 402

[6] Cotter P.G., 1956, J AM CERAM SOC, V39, P11

[7] SOLID-STATE REACTIONS IN TITANIUM THIN-FILMS ON SILICON [J]. THIN SOLID FILMS, 1976, 34 (01) : 135 - 138

[8] Laves F, 1939, Z KRISTALLOGR, V101, P78

[9] Maissel L.I., 1970, HDB THIN FILM TECHNO, P13

[10] MELLAIRSMITH CM, UNPUBLISHED

[1] AXELROD NN, UNPUBLISHED

[2] GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON [J]. APPLIED PHYSICS LETTERS, 1972, 20 (09) : 359 - &

[3] BUMPS ES, 1953, T AM SOC METAL, V45, P1008

[4] CHANG CC, UNPUBLISHED

[5] IMPLANTED NOBLE-GAS ATOMS AS DIFFUSION MARKERS IN SILICIDE FORMATION [J]. THIN SOLID FILMS, 1975, 25 (02) : 393 - 402

[6] Cotter P.G., 1956, J AM CERAM SOC, V39, P11

[7] SOLID-STATE REACTIONS IN TITANIUM THIN-FILMS ON SILICON [J]. THIN SOLID FILMS, 1976, 34 (01) : 135 - 138

[8] Laves F, 1939, Z KRISTALLOGR, V101, P78

[9] Maissel L.I., 1970, HDB THIN FILM TECHNO, P13

[10] MELLAIRSMITH CM, UNPUBLISHED