CHANGES OF VOLUME AND SURFACE COMPOSITIONS OF POLYMETHYLMETHACRYLATE UNDER ELECTRON-BEAM IRRADIATION IN LITHOGRAPHY

被引：12

作者：

SAMOTO, N

SHIMIZU, R

HASHIMOTO, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 04期

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D O I：

10.1143/JJAP.24.482

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：482 / 486

页数：5

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