MASS-SPECTROSCOPIC AND ELECTRON-SPECTROSCOPIC OBSERVATION OF RESIST DECOMPOSITION BY SYNCHROTRON RADIATION

被引：6

作者：

ICHIMURA, S

HIRATA, M

TANINO, H

ATODA, N

HOH, K

ONO, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1983年 / 22卷 / 07期

关键词：

D O I：

10.1143/JJAP.22.L406

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：L406 / L408

页数：3

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