ANTIREFLECTION COATING FOR LASER-DIODES

被引:4
作者
SHIGIHARA, K
AOYAGI, T
KAKIMOTO, S
AIGA, M
OSTUBO, M
IKEDA, K
机构
[1] Optoelectronics and Microwave Devices Laboratory, Mitsubishi Electric Corporation, Itami, Hyogo 664
关键词
ANTIREFLECTION COATINGS; SEMICONDUCTOR JUNCTION LASERS;
D O I
10.1049/el:19951101
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel design for an antireflection (AR) coating layer on facets of laser diodes (LDs) is proposed and the validity of the design is confirmed experimentally. The proposed novel AR coating, consisting of multilayers, is designable such that the characteristic matrix is equivalent to that of the ideal quarter wavelength single layer AR coating. Applying this idea to laser diodes with a lasing wavelength of 1.3 mu m and equivalent refractive index of 3.2, a very low reflectivity of 0.08% has been realised by the stratified three layers which consist of alumina (Al2O3, 9O2 Angstrom)/amorphous silicon (a-Si, 83 Angstrom)/ Al2O3 (902 Angstrom), deposited by electron beam evaporation.
引用
收藏
页码:1574 / 1576
页数:3
相关论文
共 8 条
[1]  
Born M., 1980, PRINCIPLES OPTICS
[2]  
Eisenstein G, 1984, Appl Opt, V23, P161, DOI 10.1364/AO.23.000161
[3]   MEASUREMENT OF THE MODAL REFLECTIVITY OF AN ANTI-REFLECTION COATING ON A SUPERLUMINESCENT DIODE [J].
KAMINOW, IP ;
EISENSTEIN, G ;
STULZ, LW .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1983, 19 (04) :493-495
[4]  
LADANY I, 1983, APPL OPTICS, V25, P472
[5]   STEPWISE-GRADED-INDEX MULTILAYER BROAD-BAND LOW-REFLECTIVITY COATING FOR ALGAAS/GAAS POWER LASERS [J].
MARCLAY, E ;
WEBB, DJ ;
BUCHMANN, P ;
VETTIGER, P .
APPLIED PHYSICS LETTERS, 1989, 55 (10) :942-944
[6]   LOW THRESHOLD INGAASP-INP BURIED CRESCENT LASER WITH DOUBLE CURRENT CONFINEMENT STRUCTURE [J].
OOMURA, E ;
MUROTANI, T ;
HIGUCHI, H ;
NAMIZAKI, H ;
SUSAKI, W .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1981, 17 (05) :646-650
[7]   THEORETICAL-ANALYSIS AND FABRICATION OF ANTIREFLECTION COATINGS ON LASER-DIODE FACETS [J].
SAITOH, T ;
MUKAI, T ;
MIKAMI, O .
JOURNAL OF LIGHTWAVE TECHNOLOGY, 1985, 3 (02) :288-293
[8]   DIRECTLY CONTROLLED DEPOSITION OF ANTIREFLECTION COATINGS FOR SEMICONDUCTOR-LASERS [J].
SERENYI, M ;
HABERMEIER, HU .
APPLIED OPTICS, 1987, 26 (05) :845-849