ULTRAMICROHARDNESS EXPERIMENTS ON VAPOUR-DEPOSITED FILMS OF PURE METALS AND ALLOYS

被引：13

作者：

WIERENGA, PE

DIRKS, AG

VANDENBROEK, JJ

机构：

[1] Philips Research Lab, Eindhoven, Neth, Philips Research Lab, Eindhoven, Neth

来源：

THIN SOLID FILMS | 1984年 / 119卷 / 04期

关键词：

D O I：

10.1016/0040-6090(84)90261-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：375 / 382

页数：8

共 13 条

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JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1982, 15 (01) :119-122

[8] ULTRA-MICROHARDNESS OF VACUUM-DEPOSITED FILMS .1. ULTRA-MICROHARDNESS TESTER [J].

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[9]

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[10]

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