THERMAL PROFILES DURING RECRYSTALLIZATION OF SILICON ON INSULATOR WITH SCANNING INCOHERENT-LIGHT LINE SOURCES

被引：20

作者：

KUBOTA, K

HUNT, CE

FREY, J

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 46卷 / 12期

关键词：

D O I：

10.1063/1.95741

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1153 / 1155

页数：3

共 13 条

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